This paper presents novel micromachined two-dimensional array piezoelectrically actuated flextensional transducers that can be used to generate sound in air or water. Micromachining techniques to fabricate these devices are also presented. Individual unimorph array elements consist of a thin piezoelectric annular disk and a thin, fully clamped, circular plate. We manufacture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz with 0.15 microm/V peak displacement. The devices have a range of operating resonance frequencies starting from 450 kHz up to 4.5 MHz. Such an array could be combined with on-board driving and addressing circuitry for different applications.

译文

本文介绍了新型的微机械二维阵列压电驱动的挠曲张换能器,可用于在空气或水中产生声音。还介绍了制造这些设备的微加工技术。单个单压电晶片阵列元件由薄的压电环形盘和薄的,完全夹紧的圆板组成。我们使用平面硅微加工在二维阵列中制造换能器,并演示了在2.85 MHz的空气中具有0.15 microm/V峰值位移的超声传输。这些器件具有从450 kHz到4.5 MHz开始的一系列工作谐振频率。这样的阵列可以与用于不同应用的车载驱动和寻址电路结合使用。

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